Description
XYZ Travel (mm): 300 x 150 x 150
XYZ Scale Resolution: 0.1µm
Stage Drive System: DC Servo Motor X, Y, Z
X-Y Axis Velocity: 150mm/sec
Z-Axis Velocity: 100mm/sec
Imaging Optics: Single magnification, fixed lens optics with factory configurable back tube and field interchangeable front lens
Metrology Camera: (1) 2.0 Mega-Pixel Camera and associated electronics.
Back Tube: View 1x Back Tube
Standard Front Lens: VIEW 2.5X ; FOV (mm) 2.78 x 2.07
Illumination: Programmable LED illumination system for coaxial through the-lens surface light, below-the-stage backlight, and multicolor ring light with motorized incidence angle control
Measurement Modes: High Speed Move And Measure (MAM)
Power Requirements: Auto-switching power supply 100-120VAC or 200-240VAC; 50/60 Hz
XY Area Accuracy: E2 : (1.8+6L/1000) µm
Z Linear Accuracy: E1 : (2.0+5L/1000) µm
Equipped With:
Multi-Function Joystick for Stage Control
System Controller: Intel® processor based Microsoft® Windows® operating system and on-board networking and communication ports
Controller Accessory Package: QVI multifunction handheld controller with 3 axis joystick and illumination controls
VIEW Dual Mag Optics (DMO): System provides two optical paths for 1x and 4x magnification of the front objective. Magnification changes are instantaneous, with no
moving parts, and no need to recalibrate.
