Description
Stage Size: 300 × 200 mm (11.81″ × 7.87″)
Measurement Modes:
Wide-Field: 300 × 200 mm
High-Precision: 225 × 125 mm
Image Sensor: 1″ 20-megapixel monochrome CMOS
Display: 12.1″ LCD Monitor (1280 × 800 WXGA)
Lens: Double telecentric lens
Measurement Accuracy (±2σ):
Wide-Field: ±(2.8 + 0.02D) μm
High-Precision: ±(1.4 + 0.04D) μm
Repeatability:
Wide-Field: ±1 μm (no stage movement)
High-Precision: ±0.5 μm (no stage movement)
XY Stage Movement Range: 200 × 100 mm (electric)
Z Stage Movement Range: 75 mm
Stage Load Capacity: 7.5 kg
Light Probe:
Diameter: ø3 mm
Measuring Force: 0.015 N
Accuracy: ±(8 + 0.02L) μm
Repeatability: ±2 μm
Connectivity:
LAN (RJ-45: 10/100/1000BASE-T)
USB 3.1: 4 ports (rear)
USB 2.0: 4 ports (2 front, 2 rear)
DVI-D Monitor Output
Illumination:
Telecentric transparent illumination
Ring and slit ring (multi-angle, electric)
Hard Drive: 500 GB
Power Requirements: 100–240 VAC ±10%, 50/60 Hz
Power Consumption: 430 VA or less
Operating Temp: +10 to 35°C
Weight: Approx. 33 kg (72.8 lbs)
Includes Rotary Attachment
Last Calibrated: 9/19/2023
Full Data Sheet Available By Request
